CPC G03F 7/70775 (2013.01) | 20 Claims |
1. A control apparatus for controlling a controlled object, the control apparatus comprising:
a measuring device configured to measure a state of the controlled object; and
a controller configured to generate a manipulated variable corresponding to an output of the measuring device and a target value,
wherein the controller includes:
a compensator, including a neural network, configured to output an index corresponding to the output of the measuring device and the target value; and
a converter configured to convert the index into the manipulated variable such that a probability at which a predetermined manipulated variable is generated is a target probability.
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