CPC G03B 21/208 (2013.01) [G02B 5/0257 (2013.01); G02B 5/0278 (2013.01); G02B 27/0961 (2013.01)] | 15 Claims |
1. A homogenizing module for homogenizing a beam, the homogenizing module comprising an anisotropic diffuser and a homogenizer, wherein:
the anisotropic diffuser is located on a transmission path of the beam, the beam has a first divergence angle in a first direction and a second divergence angle in a second direction after passing through the anisotropic diffuser, and the first divergence angle is greater than the second divergence angle; and
the homogenizer is located on a transmission path of the beam from the anisotropic diffuser, the homogenizer comprises a plurality of optical elements, and a size of one of the optical elements in the first direction is greater than a size of the one of the optical element in the second direction, wherein the first direction is perpendicular to the second direction.
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