CPC G02B 26/10 (2013.01) [G02B 27/0927 (2013.01); G02B 27/0988 (2013.01); G02B 27/10 (2013.01); G02B 27/106 (2013.01); G02B 27/144 (2013.01); G02F 1/113 (2013.01); H10K 50/824 (2023.02); H10K 71/00 (2023.02); G02B 13/0005 (2013.01); H10K 59/12 (2023.02); H10K 59/1201 (2023.02); H10K 59/123 (2023.02)] | 14 Claims |
1. A laser beam irradiation apparatus, comprising:
a laser light source for generating a first Gaussian beam;
a controller, including an acusto-optic modulator (AOM), for receiving the first Gaussian beam, controlling energy of light of the first Gaussian beam, and emitting a second Gaussian beam;
a first optical system for adjusting a shape of light of the second Gaussian beam, the first optical system comprising:
a slit for directly receiving the second Gaussian beam from the controller and transmitting only a center portion of the second Gaussian beam, and
a reducer for directly receiving light emitted from the slit and reducing a size of a cross section of light emitted from the slit;
a scanner for directly receiving light emitted from the reducer and adjusting a direction of the light emitted from the reducer; and
an F-theta lens for diminishing a beam emitted from the scanner.
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