US 11,693,232 B2
Laser beam irradiation apparatus
Gyoo-Wan Han, Yongin-si (KR); Ku-Hyun Kang, Yongin-si (KR); Hae-Sook Lee, Yongin-si (KR); Jin-Hong Jeun, Yongin-si (KR); and Kyoung-Seok Cho, Yongin-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed on Nov. 30, 2016, as Appl. No. 15/364,594.
Application 15/364,594 is a division of application No. 14/510,322, filed on Oct. 9, 2014, granted, now 9,515,294.
Claims priority of application No. 10-2014-0023712 (KR), filed on Feb. 27, 2014.
Prior Publication US 2017/0082851 A1, Mar. 23, 2017
Int. Cl. G02B 26/10 (2006.01); G02B 27/10 (2006.01); G02B 27/14 (2006.01); G02B 27/09 (2006.01); H10K 50/824 (2023.01); H10K 71/00 (2023.01); G02F 1/11 (2006.01); G02B 13/00 (2006.01); H10K 59/12 (2023.01); H10K 59/123 (2023.01)
CPC G02B 26/10 (2013.01) [G02B 27/0927 (2013.01); G02B 27/0988 (2013.01); G02B 27/10 (2013.01); G02B 27/106 (2013.01); G02B 27/144 (2013.01); G02F 1/113 (2013.01); H10K 50/824 (2023.02); H10K 71/00 (2023.02); G02B 13/0005 (2013.01); H10K 59/12 (2023.02); H10K 59/1201 (2023.02); H10K 59/123 (2023.02)] 14 Claims
OG exemplary drawing
 
1. A laser beam irradiation apparatus, comprising:
a laser light source for generating a first Gaussian beam;
a controller, including an acusto-optic modulator (AOM), for receiving the first Gaussian beam, controlling energy of light of the first Gaussian beam, and emitting a second Gaussian beam;
a first optical system for adjusting a shape of light of the second Gaussian beam, the first optical system comprising:
a slit for directly receiving the second Gaussian beam from the controller and transmitting only a center portion of the second Gaussian beam, and
a reducer for directly receiving light emitted from the slit and reducing a size of a cross section of light emitted from the slit;
a scanner for directly receiving light emitted from the reducer and adjusting a direction of the light emitted from the reducer; and
an F-theta lens for diminishing a beam emitted from the scanner.