US 11,693,187 B2
Multi-axis MEMS mirror parking
Hsing Cheng, San Jose, CA (US); and Kevin Yasumura, Lafayette, CA (US)
Assigned to Google LLC, Mountain View, CA (US)
Filed by Google LLC, Mountain View, CA (US)
Filed on Dec. 1, 2020, as Appl. No. 17/108,229.
Claims priority of provisional application 62/976,826, filed on Feb. 14, 2020.
Prior Publication US 2021/0255399 A1, Aug. 19, 2021
Int. Cl. G02B 6/35 (2006.01); B81B 3/00 (2006.01); H04B 10/69 (2013.01)
CPC G02B 6/3518 (2013.01) [B81B 3/0062 (2013.01); G02B 6/3556 (2013.01); G02B 6/3584 (2013.01); G02B 6/3586 (2013.01); G02B 6/3588 (2013.01); H04B 10/69 (2013.01); B81B 2201/042 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for configuring an optical circuit switch (OCS), comprising:
selecting a microelectromechanical system (MEMS) mirror of a plurality of MEMS mirrors in the OCS, each of the plurality of MEMS mirrors having at least two axes for rotation, wherein the selected MEMS mirror is not used for routing optical signals;
applying first voltage to a first axis of the selected MEMS mirror to move the selected MEMS mirror in a first direction; and
applying a second voltage to a second axis of the selected MEMS mirror to move the selected MEMS mirror in a second direction,
wherein the movements in the first direction and the second direction causes the selected MEMS mirror to be parked outside a region of interest, wherein the region of interest is defined by locations of a plurality of non-selected MEMS mirrors.