| CPC G01R 31/2891 (2013.01) [G01R 31/2829 (2013.01); B25J 9/0084 (2013.01)] | 13 Claims |
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1. A sensor test apparatus for testing a sensor that includes an individualized die and that detects a first physical quantity, the sensor test apparatus comprising:
an application unit comprising a plurality of application devices, each of the application devices including:
a socket to which the sensor is electrically connected,
a first application part that applies the first physical quantity to the sensor,
a second application part that applies a second physical quantity to the sensor, the second physical quantity being different from the first physical quantity, and
a pusher that contacts the sensor and presses the sensor against the socket;
a test unit that tests the sensor via the socket based on a signal output from the sensor, the signal corresponding to the first physical quantity detected by the sensor; and
a conveying device that conveys the sensor into and out of the application unit, wherein
the second application part is a temperature adjustment part that applies a thermal stress as the second physical quantity to the sensor to adjust the temperature of the sensor,
the conveying device conveys the sensor toward the socket from above the socket and places the sensor on the socket, and
the pusher presses the sensor against the socket downwardly to electrically connect the sensor to the socket for testing the sensor including the individualized die after the conveying device releases the sensor.
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