US 11,692,874 B2
Peak alignment for the wavelength calibration of a spectrometer
Yan Chen, Fremont, CA (US); and Xinkang Tian, Fremont, CA (US)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Jun. 1, 2021, as Appl. No. 17/335,814.
Prior Publication US 2022/0381612 A1, Dec. 1, 2022
Int. Cl. G01J 3/02 (2006.01); G01J 3/18 (2006.01); G01J 3/28 (2006.01)
CPC G01J 3/0297 (2013.01) [G01J 3/0208 (2013.01); G01J 3/18 (2013.01); G01J 3/2803 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A method for wavelength calibration of a spectrometer, comprising:
receiving a calibration light signal having a plurality of first spectral components of different first wavelengths;
separating and projecting the first spectral components onto a plurality of pixels of a detector of the spectrometer simultaneously;
establishing a relation between the first wavelengths of the first spectral components and pixel numbers of first ones of the pixels on which the first spectral components are projected by constructing a curve that fits the first wavelengths of the first spectral components and the pixel numbers of the first pixels;
calculating first residual errors between the first wavelengths and estimated wavelengths that are associated by the relation to the pixel numbers of the first pixels, respectively;
calibrating a second wavelength of a second spectral component of an optical signal based on a second residual error;
receiving the optical signal; and
projecting the optical signal onto at least a second one of the pixels of the detector,
wherein the second residual error is calculated based on at least one of the first residual errors, and
the second residual error is equal to one of the first residual errors that corresponds to one of the first pixels that has a smallest pixel number when a pixel number of the second pixel is smaller than the smallest pixel number, and is equal to another one of the first residual errors that corresponds to one of the first pixels that has a largest pixel number when the pixel number of the second pixel is larger than the largest pixel number.