CPC C23C 16/45559 (2013.01) [B05B 1/005 (2013.01); C23C 16/4405 (2013.01); C23C 16/45565 (2013.01); H01J 37/3244 (2013.01)] | 20 Claims |
1. A gas distribution plate assembly, comprising:
a diffuser plate having an upstream side, a downstream side, wherein the diffuser plate has a thickness between about 1.0 inch and about 2.2 inches and an area greater than about 1080 square inches;
a plurality of gas passages passing between the upstream and downstream sides, wherein each of the gas passages comprise:
a first cylindrical section extending from the upstream side;
a first coaxial conical section extending from the downstream side;
a first connecting section connected to the first cylindrical section and a second coaxial cylindrical section;
wherein a ratio of a length of the second coaxial cylindrical section to a length of the first coaxial conical section is between 0.8 and 2.0 and a ratio of a length of the first cylindrical section to a length of the second coaxial cylindrical section is between 0.3 and 1.5; and
a second connecting section connected to the second coaxial cylindrical section and the first coaxial conical section.
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