US 11,691,184 B2
System and tool for cleaning a glass surface of an accelerator column
Michael J. Blanchard, Marblehead, MA (US); Nevin H. Clay, Boxford, MA (US); Joshua R. Conahan, Haverhill, MA (US); and Christopher Lupoli, Exeter, NH (US)
Assigned to Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US)
Filed by Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US)
Filed on Aug. 31, 2020, as Appl. No. 17/7,044.
Application 17/007,044 is a division of application No. 15/489,133, filed on Apr. 17, 2017, granted, now 10,780,459.
Prior Publication US 2020/0391251 A1, Dec. 17, 2020
Int. Cl. B08B 9/00 (2006.01); B08B 1/00 (2006.01); A47L 13/16 (2006.01); A47L 13/46 (2006.01); H01J 37/317 (2006.01); B08B 1/04 (2006.01); B08B 5/04 (2006.01)
CPC B08B 1/005 (2013.01) [A47L 13/16 (2013.01); A47L 13/46 (2013.01); B08B 1/00 (2013.01); H01J 37/3171 (2013.01); B08B 1/04 (2013.01); B08B 5/04 (2013.01); H01J 2237/022 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A method of maintaining an accelerator column, wherein the accelerator column comprises a plurality of electrodes and a plurality of electrode inserts, and wherein each of the electrode inserts is coupled to one of the electrodes of the plurality of electrodes, the method comprising:
removing one or more electrode inserts from the accelerator column
inserting a cleaning tool into the accelerator column;
inserting a foam body located at an end of a shaft of the cleaning tool into a space between adjacent electrodes of the plurality of electrodes, the space being created at least partially by a void created as a result of removing one of the electrode inserts, wherein an outer circumference of the foam body includes a textured cleaning surface for contacting a glass surface of the accelerator column, and wherein the textured cleaning surface includes a plurality of curved serrations extending along a curvature of the textured cleaning surface for contacting a plurality of grooves formed in the glass surface; and
rotating the cleaning tool to clean the space.