US 10,342,114 B2
RF resonator for ion beam acceleration
Shu Satoh, Byfield, MA (US)
Assigned to Axcelis Technologies, Inc., Beverly, MA (US)
Filed by Axcelis Technologies, Inc., Beverly, MA (US)
Filed on Sep. 7, 2018, as Appl. No. 16/124,676.
Claims priority of provisional application 62/559,103, filed on Sep. 15, 2017.
Prior Publication US 2019/0088443 A1, Mar. 21, 2019
Int. Cl. H05H 5/08 (2006.01); H05H 7/18 (2006.01); C23C 14/48 (2006.01); H01J 37/24 (2006.01); H01J 37/317 (2006.01)
CPC H05H 7/18 (2013.01) [C23C 14/48 (2013.01); H01J 37/24 (2013.01); H05H 5/08 (2013.01); H01J 37/3171 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An RF feedthrough for an ion implantation system, the RF feedthrough comprising:
an electrically insulative cone having a first cone end and a second cone end, wherein the electrically insulative cone is generally hollow and has a first opening at the first cone end and a second opening at the second cone end, wherein the first opening has a first diameter associated therewith and the second opening has a second diameter associated therewith, and wherein the first diameter is larger than the second diameter, therein generally defining a tapered sidewall of the electrically insulative cone;
a stem operably coupled to the second cone end of the electrically insulative cone, wherein the stem passes through the first opening and second opening of the electrically insulative cone; and
a flange operably coupled to the first cone end of the electrically insulative cone, wherein the flange has a flange opening defined therein, wherein the flange opening has a third diameter associated therewith, wherein the third diameter is smaller than the first diameter, and wherein the stem passes through the flange opening without contacting the flange, and wherein the flange is configured to operably couple the electrically insulative cone to a hole defined in a wall of a chamber, wherein the electrically insulative cone and flange are configured to pass the stem through the hole in the wall of the chamber while electrically insulating the stem from the wall of the chamber.