US 11,690,305 B2
Phase change memory cell with an airgap to allow for the expansion and restriction of the PCM material
Kangguo Cheng, Schenectady, NY (US); Ruilong Xie, Niskayuna, NY (US); Carl Radens, LaGrangeville, NY (US); and Juntao Li, Cohoes, NY (US)
Assigned to International Business Machines Corporation, Armonk, NY (US)
Filed by INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US)
Filed on Jun. 9, 2021, as Appl. No. 17/303,836.
Prior Publication US 2022/0399493 A1, Dec. 15, 2022
Int. Cl. H10N 70/00 (2023.01); G11C 13/00 (2006.01)
CPC H10N 70/841 (2023.02) [G11C 13/0004 (2013.01); H10N 70/011 (2023.02); H10N 70/8265 (2023.02); H10N 70/8825 (2023.02); H10N 70/8828 (2023.02)] 18 Claims
OG exemplary drawing
 
1. A phase change memory (PCM) cell comprising:
a first electrode located on a substrate;
a phase change material layer located adjacent to the first electrode, wherein a first side of the phase change material layer is in direct contact with the first electrode;
a second electrode located adjacent to phase change material layer, wherein the second electrode is in direct contact with a second side of the phase change material layer, wherein the first side and the second side are different sides of the phase change material layer; and
an airgap located directly above the phase change material layer, wherein the airgap provides space for the phase change material to expand or restrict, and wherein the phase change material is located entirely beneath the airgap.