US 11,690,278 B2
Laser ablation apparatus and method of manufacturing display device
Joon Hyung Kim, Yongin-si (KR); Young Su Chae, Yongin-si (KR); Woo Hyun Kim, Yongin-si (KR); and Seung Jun Lee, Yongin-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-Si (KR)
Filed by Samsung Display Co., Ltd., Yongin-Si (KR)
Filed on May 8, 2019, as Appl. No. 16/406,250.
Claims priority of application No. 10-2018-0108470 (KR), filed on Sep. 11, 2018.
Prior Publication US 2020/0083449 A1, Mar. 12, 2020
Int. Cl. H01L 51/00 (2006.01); H01S 3/16 (2006.01); H01S 3/23 (2006.01); G02B 27/10 (2006.01); H01L 51/56 (2006.01); H01L 27/32 (2006.01); B23K 26/342 (2014.01)
CPC H01L 51/003 (2013.01) [B23K 26/342 (2015.10); G02B 27/10 (2013.01); H01L 27/3244 (2013.01); H01L 51/0097 (2013.01); H01L 51/56 (2013.01); H01S 3/1618 (2013.01); H01S 3/1643 (2013.01); H01S 3/2383 (2013.01); H01L 2227/326 (2013.01); H01L 2251/5338 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A laser ablation apparatus comprising:
a laser beam generator including beam sources for generating laser beams, the laser beam generator using a solid-state laser;
an output beam generator configured to generate an output beam using the laser beams; and
a substrate stage including at least one stage in which a carrier substrate on which a panel substrate is formed is disposed,
wherein the output beam generator includes:
mixers configured to generate mixed laser beams having a plurality of linear-polarizations which intersect at a predetermined angle by mixing the laser beams; and
a photo molding machine configured to generate the output beam using the mixed laser beams,
wherein the laser beams include first laser beams and second laser beams, and
wherein the mixers rotate a polarization direction of the first laser beams by the predetermined angle and mix the first laser beams having a rotated polarization direction and the second laser beams to generate the mixed laser beams.