CPC H01L 21/67766 (2013.01) [B25J 11/0095 (2013.01); H01L 21/67742 (2013.01); H01L 21/67778 (2013.01); H01L 21/68707 (2013.01)] | 20 Claims |
1. A system, comprising:
a cassette comprising a slit opening configured to house a wafer; and
a blade configured to move the wafer to and from the slit opening by extending into the slit opening, wherein the blade is configured to secure the wafer within a contoured pocket on the blade, and
wherein the blade further comprises:
a first forward protrusion with rounded corners;
a second forward protrusion with rounded corners, the second forward protrusion extending parallel to the first forward protrusion;
a first opening having a portion that extends into a part of the first forward protrusion; and
a second opening having a portion that extends into a part of the second forward protrusion,
wherein the blade further comprises an upper pocket contour and a lower pocket contour, wherein the upper pocket contour and lower pocket contour form an outline of two concentric circles where an area between the two concentric circles forms a wafer pocket on which the wafer rests, and wherein each of the upper and lower pocket contours comprises rounded vertical outside corners and rounded horizontal outside corners.
|