CPC H01J 37/3455 (2013.01) [C23C 14/3407 (2013.01); C23C 14/3442 (2013.01); C23C 14/351 (2013.01); H01J 37/3405 (2013.01); H01J 37/3414 (2013.01); H01J 37/3435 (2013.01); H01J 37/3452 (2013.01); H01J 37/3461 (2013.01); H01L 21/02631 (2013.01)] | 20 Claims |
1. An apparatus, comprising:
a processing chamber configured to house a workpiece;
a target holder in the processing chamber;
a first magnetic element over a backside of the target holder;
a first arm assembly connected to the first magnetic element;
a rotational shaft; and
a first hinge mechanism connecting the rotational shaft and the first arm assembly, wherein the first arm assembly comprises a first prong and a second prong at opposite sides of the first hinge mechanism; and
a controller programmed to control motion of the first arm assembly in such a way that the first prong revolves in an orbit motion path about the first hinge mechanism while the second prong remains stationary.
|