US 11,688,583 B2
Operating a particle beam apparatus with an object holder
Alexander Orchowski, Oberkochen (DE)
Assigned to Carl Zeiss Microscopy GmbH, Jena (DE)
Filed by Carl Zeiss Microscopy GmbH, Jena (DE)
Filed on Aug. 27, 2021, as Appl. No. 17/458,771.
Claims priority of application No. 102020122535.0 (DE), filed on Aug. 28, 2020.
Prior Publication US 2022/0230843 A1, Jul. 21, 2022
Int. Cl. H01J 37/28 (2006.01); H01J 37/20 (2006.01); H01J 37/304 (2006.01)
CPC H01J 37/28 (2013.01) [H01J 37/20 (2013.01); H01J 37/3045 (2013.01); H01J 2237/20221 (2013.01); H01J 2237/2802 (2013.01); H01J 2237/30494 (2013.01)] 24 Claims
OG exemplary drawing
 
1. A method for operating a beam apparatus comprising:
generating at least one marking on an object holder using a laser beam of a laser beam apparatus and/or a particle beam of a particle beam apparatus, wherein the particle beam includes charged particles;
arranging at least one object on the object holder;
moving the object holder using a translational movement of the object holder along at least one axis (x-axis, y-axis, z-axis) and/or a rotation of the object holder about at least one axis of rotation;
positioning the particle beam and/or the laser beam in relative fashion in relation to the object using the marking; and
processing, imaging and/or analyzing the object using the particle beam and/or the laser beam.