CPC H01J 37/28 (2013.01) [H01J 37/20 (2013.01); H01J 37/3045 (2013.01); H01J 2237/20221 (2013.01); H01J 2237/2802 (2013.01); H01J 2237/30494 (2013.01)] | 24 Claims |
1. A method for operating a beam apparatus comprising:
generating at least one marking on an object holder using a laser beam of a laser beam apparatus and/or a particle beam of a particle beam apparatus, wherein the particle beam includes charged particles;
arranging at least one object on the object holder;
moving the object holder using a translational movement of the object holder along at least one axis (x-axis, y-axis, z-axis) and/or a rotation of the object holder about at least one axis of rotation;
positioning the particle beam and/or the laser beam in relative fashion in relation to the object using the marking; and
processing, imaging and/or analyzing the object using the particle beam and/or the laser beam.
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