CPC H01J 37/147 (2013.01) [H01J 37/04 (2013.01); H01J 37/153 (2013.01); H01J 37/28 (2013.01); H01J 2237/061 (2013.01); H01J 2237/083 (2013.01); H01J 2237/1532 (2013.01); H01J 2237/1534 (2013.01); H01J 2237/2817 (2013.01)] | 20 Claims |
1. A source-conversion unit comprising:
a first array having a lens configured to:
deflect an off-axis electron beamlet of a plurality of electron beamlets; and
compensate a first portion of aberrations of a probe spot formed on a sample by the deflected off-axis electron beamlet.
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