US 11,688,579 B2
Electron emitter and method of fabricating same
Juying Dou, San Jose, CA (US); Zheng Fan, Beijing (CN); Tzu-Yi Kuo, Hsinchu (TW); and Zhong-wei Chen, San Jose, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on Dec. 13, 2021, as Appl. No. 17/549,854.
Application 17/549,854 is a continuation of application No. 17/022,504, filed on Sep. 16, 2020, granted, now 11,201,032.
Application 17/022,504 is a continuation of application No. 16/324,518, granted, now 10,784,071, issued on Sep. 22, 2020, previously published as PCT/EP2017/069270, filed on Jul. 31, 2017.
Claims priority of provisional application 62/531,793, filed on Jul. 12, 2017.
Claims priority of provisional application 62/372,084, filed on Aug. 8, 2016.
Prior Publication US 2022/0189725 A1, Jun. 16, 2022
Int. Cl. H01J 37/073 (2006.01); H01J 37/065 (2006.01); H01J 1/304 (2006.01); H01J 1/14 (2006.01); H01J 9/02 (2006.01); H01J 9/04 (2006.01); H01J 37/26 (2006.01)
CPC H01J 37/073 (2013.01) [H01J 1/14 (2013.01); H01J 1/304 (2013.01); H01J 9/025 (2013.01); H01J 9/042 (2013.01); H01J 37/065 (2013.01); H01J 37/26 (2013.01); H01J 2201/196 (2013.01); H01J 2201/30403 (2013.01); H01J 2201/30426 (2013.01); H01J 2201/30449 (2013.01); H01J 2201/30484 (2013.01); H01J 2201/30492 (2013.01); H01J 2209/0223 (2013.01); H01J 2237/06308 (2013.01); H01J 2237/06316 (2013.01); H01J 2237/06341 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An electron emitter comprising:
an emitter tip comprising a single crystal material, wherein:
the emitter tip comprises an apex with a diameter of less than 10 micrometers, and
the single crystal material comprises at least one of tungsten, molybdenum, iridium, or rhenium; and
a work-function-lowering material coated on the apex, wherein the apex coated with the work-function-lowering material has an operating temperature of higher than 700 K.