US 11,687,117 B2
Semiconductor apparatus, display apparatus, photoelectric conversion apparatus, electronic device, illumination apparatus, and movable body
Daisuke Okabayashi, Yokohama (JP); Tetsuo Takahashi, Kawasaki (JP); and Takashi Usui, Ashigarakami-gun (JP)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Aug. 17, 2020, as Appl. No. 16/995,243.
Claims priority of application No. 2019-158971 (JP), filed on Aug. 30, 2019.
Prior Publication US 2021/0064079 A1, Mar. 4, 2021
Int. Cl. G06F 1/16 (2006.01); H10K 59/124 (2023.01); B60K 35/00 (2006.01); H10K 59/65 (2023.01); H01L 27/32 (2006.01)
CPC G06F 1/1605 (2013.01) [B60K 35/00 (2013.01); H01L 27/3234 (2013.01); H01L 27/3258 (2013.01); B60K 2370/1523 (2019.05)] 14 Claims
OG exemplary drawing
 
1. A semiconductor apparatus comprising:
a first electrode arranged on an element substrate;
an insulating layer covering an end of the first electrode and being arranged on the element substrate;
a functional layer arranged on the first electrode and the insulating layer; and
a second electrode arranged above the first electrode and the insulating layer via the functional layer,
wherein, in a cross-section passing through the element substrate, the insulating layer, and the functional layer, the insulating layer includes
a first portion having a side surface inclining at an angle of 45° or more and 90° or less with respect to a parallel surface parallel to a bottom surface of the first electrode,
a second portion closer to a side of the element substrate than the first portion, and having a side surface inclining at an angle larger than 0° and smaller than 45° with respect to the parallel surface, and
a third portion on a side opposite to the element substrate with respect to the first portion, and having a side surface inclining at an angle larger than 0° and smaller than 45° with respect to the parallel surface, and
wherein, in the cross-sectional, a length of the second portion in a direction vertical to the parallel surface is larger than a length of the third portion in the vertical direction, and
wherein the first portion includes a fourth portion having a side surface inclining at an angle of 55° or more and 90° or less with respect to the parallel surface, and a length of the fourth portion in a direction vertical to the parallel surface is 50 nm or less.