US 11,687,065 B2
Method and system for generating and updating position distribution graph
Shau-Yin Tseng, Hsinchu County (TW); and Jian-Wei Chen, Zhubei (TW)
Assigned to INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, Hsinchu (TW)
Filed by INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, Hsinchu (TW)
Filed on Dec. 23, 2020, as Appl. No. 17/132,715.
Claims priority of application No. 109144899 (TW), filed on Dec. 18, 2020.
Prior Publication US 2022/0197263 A1, Jun. 23, 2022
Int. Cl. G05B 19/418 (2006.01); G06T 7/00 (2017.01); G03F 7/20 (2006.01); G03F 7/00 (2006.01); G06N 7/01 (2023.01)
CPC G05B 19/41885 (2013.01) [G03F 7/70433 (2013.01); G05B 19/4183 (2013.01); G05B 19/4188 (2013.01); G06N 7/01 (2023.01); G06T 7/0004 (2013.01)] 24 Claims
OG exemplary drawing
 
1. A method for generating and updating position distribution graph comprises:
generating at least one position distribution graph according to a circuit bitmap and an exposure pattern; wherein the circuit bitmap comprises a plurality of target pixels and a plurality of background pixels, each of said at least one position distribution graph comprises a plurality of position points, the plurality of position points locates at a part of the plurality of target pixels and are associated with the exposure pattern;
performing an exposure simulation according to each of said at least one position distribution graph to generate at least one exposure result graph, wherein the exposure simulation comprises forming a virtual spot according to each of the plurality of position points of each of said at least one position distribution graph;
comparing the circuit bitmap with said at least one exposure result graph to generate a plurality of error distribution candidate graphs;
selecting one of the plurality of error distribution candidate graphs to serve as an error distribution graph, wherein the error distribution graph comprises a plurality of error pixels; and
performing a zero-one integer programming according to the circuit bitmap and at least one of the plurality of error pixels to update one of said at least one position distribution graph, wherein the updated position distribution graph comprises a plurality of correcting position points and is associated with the selected error distribution graph.