CPC G01N 23/20058 (2013.01) [G01N 23/2055 (2013.01); G01N 23/2252 (2013.01); G01N 2223/071 (2013.01); G01N 2223/41 (2013.01); G01N 2223/605 (2013.01)] | 14 Claims |
1. An electron microscopy method, comprising:
emitting an electron beam having a precessional motion; and
acquiring, at least partly simultaneously, an electron diffraction pattern and of intensity values of X rays.
|