US 11,686,693 B2
Electron microscopy analysis method
Nicolas Bernier, Grenoble (FR); and Loïc Henry, Saint-Maximin-la-Sainte-Baume (FR)
Assigned to Commissariat à l'Energie Atomique et aux Energies Alternatives, Paris (FR)
Filed by Commissariat à l'Energie Atomique et aux Energies Alternatives, Paris (FR)
Filed on Jul. 6, 2020, as Appl. No. 16/946,782.
Claims priority of application No. 1907615 (FR), filed on Jul. 8, 2019.
Prior Publication US 2021/0010956 A1, Jan. 14, 2021
Int. Cl. G01N 23/20058 (2018.01); G01N 23/2252 (2018.01); G01N 23/2055 (2018.01)
CPC G01N 23/20058 (2013.01) [G01N 23/2055 (2013.01); G01N 23/2252 (2013.01); G01N 2223/071 (2013.01); G01N 2223/41 (2013.01); G01N 2223/605 (2013.01)] 14 Claims
OG exemplary drawing
 
1. An electron microscopy method, comprising:
emitting an electron beam having a precessional motion; and
acquiring, at least partly simultaneously, an electron diffraction pattern and of intensity values of X rays.