CPC G01N 21/9503 (2013.01) [G01N 21/8806 (2013.01); H01L 22/12 (2013.01)] | 17 Claims |
1. A characterization system, comprising:
a sample carrier;
a stage assembly including a pick-and-place head;
an imaging subsystem including a first channel and a second channel, wherein the stage assembly is configured to transfer a sample between the carrier and the imaging subsystem; and
a controller including one or more processors and memory, the one or more processors configured to execute a set of program instructions stored in the memory, the set of program instructions configured to cause the one or more processors to:
direct the stage assembly to move the sample from the carrier located at a first position to the imaging subsystem;
direct the imaging subsystem to inspect a first side of the sample via the first channel of the imaging subsystem and a second side of the sample via the second channel of the imaging subsystem;
direct the stage assembly to move the sample from the imaging subsystem to the carrier;
direct the carrier to move to a second position;
direct the carrier to rotate by 90 degrees relative to an orientation of the carrier in the first position;
direct the stage assembly to move the sample from the carrier located at the second position to the imaging subsystem; and
direct the imaging subsystem to inspect a third side of the sample via the first channel of the imaging subsystem and a fourth side of the sample via the second channel of the imaging subsystem; and
combine one or more images of each of the first side, the second side, the third side, and the fourth side of the sample.
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