US 11,686,669 B2
Optical measurement device including a light splitting module comprising light splitters and a light inspecting module comprising a plurality of inspecting cameras
Tsung-Hsien Ou, Taoyuan (TW); Hsin-Yueh Sung, Taoyuan (TW); Shih-Min Hsu, Taoyuan (TW); and Yu-Hsuan Lin, Taoyuan (TW)
Assigned to Chroma ATE Inc., Taoyuan (TW)
Filed by Tsung-Hsien Ou, Taoyuan (TW); Hsin-Yueh Sung, Taoyuan (TW); Shih-Min Hsu, Taoyuan (TW); and Yu-Hsuan Lin, Taoyuan (TW)
Filed on May 19, 2022, as Appl. No. 17/748,084.
Claims priority of application No. 110119320 (TW), filed on May 28, 2021.
Prior Publication US 2022/0381676 A1, Dec. 1, 2022
Int. Cl. G02B 27/10 (2006.01); G01N 21/25 (2006.01); G02B 27/14 (2006.01); G01N 21/27 (2006.01)
CPC G01N 21/255 (2013.01) [G01N 21/27 (2013.01); G02B 27/1013 (2013.01); G02B 27/141 (2013.01)] 9 Claims
OG exemplary drawing
 
1. An optical measurement device, for measuring light to be inspected, comprising:
a light receiving module for converting the light to be inspected into a first parallel light;
a light splitting module comprising a first light splitter and a second light splitter; and
a light inspecting module comprising a plurality of inspecting cameras;
wherein the first light splitter splits the first parallel light into a second parallel light and a third parallel light, and the second light splitter splits the second parallel light into a fourth parallel light and a fifth parallel light;
wherein the third parallel light, the fourth parallel light, and the fifth parallel light are projected to one of the plurality of inspecting cameras respectively.