CPC C23C 16/45561 (2013.01) [F16L 3/00 (2013.01); F16L 41/02 (2013.01); F16L 41/03 (2013.01); H01J 37/3244 (2013.01); H01L 21/67017 (2013.01); Y10T 137/87885 (2015.04)] | 32 Claims |
1. A flow substrate mounting structure comprising:
a fastener aperture; and
an alignment feature, wherein the alignment feature comprises at least one of an alignment pin removably coupled with the flow substrate mounting structure, an alignment slot, and an alignment step, wherein the alignment pin is configured to be removed from the flow substrate mounting structure when the flow substrate mounting structure is coupled to a flow substrate.
|