CPC B81C 1/00269 (2013.01) [B81B 7/0038 (2013.01); B81C 1/00285 (2013.01); B81C 2203/019 (2013.01); B81C 2203/0118 (2013.01); B81C 2203/035 (2013.01); B81C 2203/05 (2013.01); G01J 5/20 (2013.01)] | 19 Claims |
1. A method of manufacturing microelectromechanical systems (“MEMS”) products comprising:
providing glass spacers;
depositing an anti-reflective coating on the glass spacers;
coupling a wavelength-specific transmissive window to the anti-reflective coating;
providing a window plate;
attaching the window plate to the glass spacers;
aligning the glass spacers with a MEMS device glass plate;
bonding the glass spacers to the MEMS device glass plate; and
singulating the glass spacers, window plate, and MEMS device glass plate to produce the MEMS products.
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