US 11,685,064 B2
Tactile and/or optical distance sensor, system having such a distance sensor, and method for calibrating such a distance sensor or such a system
Philipp Mayinger, Aalen (DE)
Assigned to Carl Zeiss Industrielle Messtechnik GmbH, Oberkochen (DE)
Filed by Carl Zeiss Industrielle Messtechnik GmbH, Oberkochen (DE)
Filed on Mar. 26, 2021, as Appl. No. 17/214,559.
Claims priority of application No. 10 2020 108 406.4 (DE), filed on Mar. 26, 2020.
Prior Publication US 2021/0299891 A1, Sep. 30, 2021
Int. Cl. G01B 11/30 (2006.01); B25J 19/02 (2006.01); B25J 9/16 (2006.01); G01L 1/24 (2006.01); G01B 11/00 (2006.01)
CPC B25J 19/025 (2013.01) [B25J 9/1692 (2013.01); G01B 11/005 (2013.01); G01L 1/246 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A tactile and/or optical distance sensor comprising:
a housing having at least one elongate portion;
a measurement arm arranged in the housing, at least partially extending through the at least one elongate portion, and having at one end a tactile and/or optical probe element;
a transducer configured to capture a position of the tactile probe element or a signal of the optical probe element and to generate associated probe element measurement signals; and
an advance unit, with which the housing is linearly displaceable along an advance direction, and
wherein a strain sensor is located in a region of the measurement arm extending through the at least one elongate portion or at an adjacent region directly adjoining said region, and wherein the strain sensor has a fiber Bragg grating.