CPC A61B 3/101 (2013.01) [A61B 3/0025 (2013.01); A61B 3/14 (2013.01); G01B 9/02041 (2013.01); G01B 9/02083 (2013.01); G01B 11/06 (2013.01); G01J 3/45 (2013.01)] | 12 Claims |
1. A method for measuring layer thickness of a structure comprising:
acquiring a multi-spectral interference pattern of the structure;
performing a hyperspectral reconstruction on the multi-spectral interference pattern, thereby generating a reconstructed full- or hyper-spectral interference pattern; and
estimating the layer thickness based on the reconstructed full- or hyper-spectral interference pattern.
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