CPC H01L 43/12 (2013.01) [G11C 11/161 (2013.01); H01L 27/226 (2013.01); H01L 43/02 (2013.01); H01L 43/08 (2013.01)] | 20 Claims |
1. A device, comprising:
a conductive feature;
a dielectric layer over the conductive feature;
a bottom electrode via in the dielectric layer and over the conductive feature, wherein a topmost surface of the bottom electrode via is substantially flat; and
a diffusion barrier layer adjoining a bottom of the bottom electrode via, wherein the diffusion barrier layer has a topmost end substantially level with the topmost surface of the bottom electrode via.
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