CPC H01L 51/0017 (2013.01) [C09K 13/06 (2013.01); H01L 27/3244 (2013.01); H01L 51/5215 (2013.01); H01L 51/56 (2013.01); H01L 2227/323 (2013.01); H01L 2251/301 (2013.01)] | 26 Claims |
1. An etchant composition comprising:
an inorganic acid compound of about 8 wt % to about 15 wt %;
a sulfonic acid compound of about 2.5 wt % to about 8 wt %;
a sulfate compound of about 6 wt % to about 14 wt %;
an organic acid compound of about 40 wt % to about 55 wt %;
a metal or metal salt of about 0.01 wt % to about 0.06 wt %; and
water.
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