US 11,683,975 B2
Etchant composition and method of manufacturing display apparatus by using the same
Jonghee Park, Yongin-si (KR); and Jinseock Kim, Yongin-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Nov. 19, 2020, as Appl. No. 16/953,047.
Claims priority of application No. 10-2020-0052900 (KR), filed on Apr. 29, 2020.
Prior Publication US 2021/0343944 A1, Nov. 4, 2021
Int. Cl. H01L 51/00 (2006.01); C09K 13/06 (2006.01); H01L 27/32 (2006.01); H01L 51/52 (2006.01); H01L 51/56 (2006.01)
CPC H01L 51/0017 (2013.01) [C09K 13/06 (2013.01); H01L 27/3244 (2013.01); H01L 51/5215 (2013.01); H01L 51/56 (2013.01); H01L 2227/323 (2013.01); H01L 2251/301 (2013.01)] 26 Claims
OG exemplary drawing
 
1. An etchant composition comprising:
an inorganic acid compound of about 8 wt % to about 15 wt %;
a sulfonic acid compound of about 2.5 wt % to about 8 wt %;
a sulfate compound of about 6 wt % to about 14 wt %;
an organic acid compound of about 40 wt % to about 55 wt %;
a metal or metal salt of about 0.01 wt % to about 0.06 wt %; and
water.