CPC H01L 21/6833 (2013.01) [H01J 37/32642 (2013.01); H01J 37/32724 (2013.01)] | 20 Claims |
1. A substrate support, comprising:
a body having a center;
a lower ledge extending from the center to an annular first lip;
an annular second lip radially outward of the first lip, and separated from the first lip by a channel;
a first support surface on the first lip and a second support surface on the second lip, each of the first and second support surfaces configured to at least partially support a substrate;
a first angled wall that extends upward and radially outward from the second support surface;
a first upper surface disposed above the second support surface;
a second angled wall that extends upward and radially outward from the first upper surface, the first upper surface extending between the first angled wall and the second angled wall; and
a second upper surface extending from the second angled wall, the second upper surface being disposed above the first upper surface.
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