CPC H01L 21/68 (2013.01) [H01L 21/682 (2013.01); H01L 21/68742 (2013.01); B32B 38/10 (2013.01); G03F 1/62 (2013.01); G03F 1/64 (2013.01); G03F 1/82 (2013.01); G03F 7/70983 (2013.01); H01L 21/683 (2013.01); Y10T 156/1168 (2015.01)] | 12 Claims |
1. A pellicle removal tool comprising:
(A) a stage that holds a photomask in a fixed position relative to an associated pellicle;
(B) two or more arms positioned around the stage and configured to engage pellicle side wells included on at least one side of the pellicle and configured to be lifted in a sequential order; and
(C) two or more actuators configured to:
(i) independently adjust at least a vertical position of a corresponding arm of the two or more arms, and
(ii) lift the two or more arms in a sequential order from one arm to the next arm so as to apply a sequence of lifting forces around the pellicle with the stage holding the photomask in a fixed position for removal of the pellicle from the photomask,
wherein each of the two or more actuators comprises:
a first actuator configured to provide a fine position adjustment of the corresponding arm, and
a second actuator configured to provide a rough position adjustment of the corresponding arm,
wherein the two or more arms are each housed in a corresponding column, each column being configured to be independently positioned along the at least one side of the pellicle that includes the pellicle side wells.
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