US 11,682,550 B2
Method and device for etching patterns inside objects
Michael Vidra, Export, PA (US); Robert Vaccaro, Greensburg, PA (US); Edward Palanko, New Stanton, PA (US); and Mark Megela, Mount Pleasant, PA (US)
Assigned to Tech Met, Inc., Glassport, PA (US)
Filed by Tech Met, Inc., Glassport, PA (US)
Filed on Feb. 11, 2020, as Appl. No. 16/787,432.
Application 16/787,432 is a continuation of application No. 16/163,904, filed on Oct. 18, 2018, granted, now 10,573,506.
Application 16/163,904 is a continuation in part of application No. 15/457,313, filed on Mar. 13, 2017, granted, now 10,399,240.
Claims priority of provisional application 62/306,954, filed on Mar. 11, 2016.
Prior Publication US 2020/0176243 A1, Jun. 4, 2020
Int. Cl. H01S 3/00 (2006.01); H01L 21/02 (2006.01); G02B 27/09 (2006.01); H01S 5/00 (2006.01); G02B 27/30 (2006.01); B23K 26/352 (2014.01); B23K 26/362 (2014.01); B23K 26/402 (2014.01); B23H 3/00 (2006.01); B26D 7/26 (2006.01); B26D 3/08 (2006.01); C23F 1/00 (2006.01); C23F 1/02 (2006.01); C23F 1/04 (2006.01); B23K 26/0622 (2014.01); B23K 26/10 (2006.01); B23K 26/40 (2014.01); B23K 26/08 (2014.01); B23K 26/046 (2014.01); B23K 26/00 (2014.01); B23K 26/361 (2014.01); G02B 26/10 (2006.01); H01S 5/062 (2006.01); B23K 103/16 (2006.01); B23K 101/12 (2006.01); B23K 103/00 (2006.01); B23K 103/08 (2006.01); B23K 101/06 (2006.01); B23K 103/02 (2006.01)
CPC H01L 21/02019 (2013.01) [B23H 3/00 (2013.01); B23K 26/0006 (2013.01); B23K 26/046 (2013.01); B23K 26/0622 (2015.10); B23K 26/0823 (2013.01); B23K 26/0869 (2013.01); B23K 26/103 (2013.01); B23K 26/352 (2015.10); B23K 26/355 (2018.08); B23K 26/361 (2015.10); B23K 26/362 (2013.01); B23K 26/40 (2013.01); B23K 26/402 (2013.01); B26D 3/08 (2013.01); B26D 7/2614 (2013.01); C23F 1/00 (2013.01); C23F 1/02 (2013.01); C23F 1/04 (2013.01); G02B 26/10 (2013.01); G02B 27/0955 (2013.01); G02B 27/0977 (2013.01); G02B 27/30 (2013.01); H01L 21/02675 (2013.01); H01S 3/0071 (2013.01); H01S 5/0071 (2013.01); H01S 5/0085 (2013.01); H01S 5/06243 (2013.01); B23K 2101/06 (2018.08); B23K 2101/12 (2018.08); B23K 2103/02 (2018.08); B23K 2103/08 (2018.08); B23K 2103/16 (2018.08); B23K 2103/42 (2018.08); B23K 2103/50 (2018.08); B23K 2103/52 (2018.08); B23K 2103/54 (2018.08)] 17 Claims
OG exemplary drawing
 
9. A system for forming an etched pattern on an interior surface of a hollow object, the system comprising:
a laser system comprising:
a laser source,
a focusing lens, and
a laser head positioned distally from the laser source along a longitudinal axis, the laser head including a reflector,
wherein the laser system is configured to change a positional relationship between the reflector and the focusing lens to accommodate a change in a distance between the reflector and the interior surface of the hollow object so that a focal point of the laser system remains focused on the interior surface; and
a motion control system configured to provide rotation and translation about the longitudinal axis for one or both of the laser system and the hollow object based on a pattern to be etched, and adjustment of the positional relationship between the reflector and the focusing lens of the laser system, wherein the adjustment is inversely proportional to the distance between the reflector and the interior surface of the hollow object.