CPC G01C 19/56 (2013.01) [G01C 19/574 (2013.01); G01P 15/0802 (2013.01); G01P 15/123 (2013.01); G01P 15/18 (2013.01)] | 13 Claims |
1. A physical quantity sensor comprising:
a substrate;
an anchor portion formed on the same side as a principal surface of the substrate and fixed to the substrate;
a surrounding portion formed on the same side as the principal surface of the substrate and surrounding the anchor portion;
a detecting element configured to detect a physical quantity as a target of detection;
a moving portion provided with at least a part of the detecting element, formed on the same side as the principal surface of the substrate, and connected to the surrounding portion; and
a beam portion formed on the same side as the principal surface of the substrate and connecting the anchor portion and the surrounding portion together,
wherein the surrounding portion is fixed to the substrate.
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