US 11,680,797 B2
Physical quantity sensor
Takanori Aoyagi, Osaka (JP); Hiroyuki Aizawa, Osaka (JP); Chunzhi Dong, Osaka (JP); and Shinichi Kishimoto, Fukui (JP)
Assigned to PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD., Osaka (JP)
Appl. No. 17/442,269
Filed by Panasonic Intellectual Property Management Co., Ltd., Osaka (JP)
PCT Filed Feb. 19, 2020, PCT No. PCT/JP2020/006639
§ 371(c)(1), (2) Date Sep. 23, 2021,
PCT Pub. No. WO2020/195386, PCT Pub. Date Oct. 1, 2020.
Claims priority of application No. JP2019-061934 (JP), filed on Mar. 27, 2019.
Prior Publication US 2022/0155072 A1, May 19, 2022
Int. Cl. G01C 19/56 (2012.01); G01P 15/12 (2006.01); G01P 15/18 (2013.01); G01C 19/574 (2012.01); G01P 15/08 (2006.01)
CPC G01C 19/56 (2013.01) [G01C 19/574 (2013.01); G01P 15/0802 (2013.01); G01P 15/123 (2013.01); G01P 15/18 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A physical quantity sensor comprising:
a substrate;
an anchor portion formed on the same side as a principal surface of the substrate and fixed to the substrate;
a surrounding portion formed on the same side as the principal surface of the substrate and surrounding the anchor portion;
a detecting element configured to detect a physical quantity as a target of detection;
a moving portion provided with at least a part of the detecting element, formed on the same side as the principal surface of the substrate, and connected to the surrounding portion; and
a beam portion formed on the same side as the principal surface of the substrate and connecting the anchor portion and the surrounding portion together,
wherein the surrounding portion is fixed to the substrate.