CPC B01D 3/10 (2013.01) [B01D 5/0006 (2013.01); B01D 5/006 (2013.01); C02F 1/041 (2013.01); C02F 2103/08 (2013.01)] | 20 Claims |
1. A vacuum source, comprising:
a. a first chamber, wherein gas transport is permitted into and out of the first chamber;
b. a second chamber, the second chamber containing a refrigerant;
c. a flexible diaphragm separating the first chamber and the second chamber; and
d. a heating element in the second chamber.
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