US 11,678,113 B2
Accelerometer contact microphones and methods thereof
Farrokh Ayazi, Atlanta, GA (US); Pranav Gupta, Atlanta, GA (US); and Yaesuk Jeong, Atlanta, GA (US)
Assigned to Georgia Tech Research Corporation, Atlanta, GA (US)
Appl. No. 17/48,816
Filed by Georgia Tech Research Corporation, Atlanta, GA (US)
PCT Filed Mar. 28, 2019, PCT No. PCT/US2019/024679
§ 371(c)(1), (2) Date Oct. 19, 2020,
PCT Pub. No. WO2019/204003, PCT Pub. Date Oct. 24, 2019.
Claims priority of provisional application 62/659,387, filed on Apr. 18, 2018.
Prior Publication US 2021/0127202 A1, Apr. 29, 2021
Int. Cl. H04R 1/00 (2006.01); H04R 1/46 (2006.01); B81B 7/02 (2006.01); G01P 15/097 (2006.01); G01P 15/125 (2006.01); H04R 1/04 (2006.01); H04R 19/04 (2006.01)
CPC H04R 1/46 (2013.01) [B81B 7/02 (2013.01); G01P 15/097 (2013.01); G01P 15/125 (2013.01); H04R 1/04 (2013.01); H04R 19/04 (2013.01); B81B 2201/0235 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0154 (2013.01); B81B 2203/04 (2013.01); H04R 2201/003 (2013.01)] 27 Claims
OG exemplary drawing
 
1. A contact microphone comprising:
a first proof mass;
a second proof mass;
a first sensing electrode;
a second sensing electrode;
a first sensing gap between the first proof mass and the first sensing electrode;
a second sensing gap between the second proof mass and the second sensing electrode;
a torsional tether configured to support the first proof mass and the second proof mass; and
a casing enclosing the first and second proof masses, the first and second sensing electrodes, and the first and second sensing gaps;
wherein the contact microphone has a vibration acceleration sensitivity of better than 100 μg√Hz.