CPC H04N 1/32149 (2013.01) [G01J 5/0804 (2022.01); H04N 5/33 (2013.01); G01J 2005/0077 (2013.01)] | 17 Claims |
1. An apparatus for detecting a transient thermal gradient in a substrate comprising:
an electromagnetic radiation source configured to emit source electromagnetic radiation;
a fast shutter configured to block the source electromagnetic radiation when closed, and open in response to a command to pulse the source electromagnetic radiation, wherein the fast shutter also blocks heat radiated by the electromagnetic radiation source when closed;
a substrate support that supports a substrate disposed to emit a pulsed radiation from a back side of the substrate when the source electromagnetic radiation is pulsed through the substrate; and
a detector configured to face the back side of the substrate and detect a transient thermal gradient in the pulsed radiation.
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