US 11,677,890 B2
Apparatus for detecting a transient thermal gradient in a substrate
Jason G. Zeibel, Fairfax Station, VA (US); William Paul Blase, Alexandria, VA (US); and John K. Delaney, Bethesda, MD (US)
Assigned to UNITED STATES OF AMERICA, AS REPRESENTED BY THE SCRETARY OF THE ARMY, Washington, DC (US)
Filed by United States of America, as represented by the Secretary of the Army, Washington, DC (US)
Filed on Jun. 29, 2021, as Appl. No. 17/361,389.
Claims priority of provisional application 63/055,915, filed on Jul. 24, 2020.
Prior Publication US 2022/0030131 A1, Jan. 27, 2022
Int. Cl. H04N 1/32 (2006.01); H04N 5/33 (2023.01); G01J 5/0804 (2022.01); G01J 5/00 (2022.01)
CPC H04N 1/32149 (2013.01) [G01J 5/0804 (2022.01); H04N 5/33 (2013.01); G01J 2005/0077 (2013.01)] 17 Claims
OG exemplary drawing
 
1. An apparatus for detecting a transient thermal gradient in a substrate comprising:
an electromagnetic radiation source configured to emit source electromagnetic radiation;
a fast shutter configured to block the source electromagnetic radiation when closed, and open in response to a command to pulse the source electromagnetic radiation, wherein the fast shutter also blocks heat radiated by the electromagnetic radiation source when closed;
a substrate support that supports a substrate disposed to emit a pulsed radiation from a back side of the substrate when the source electromagnetic radiation is pulsed through the substrate; and
a detector configured to face the back side of the substrate and detect a transient thermal gradient in the pulsed radiation.