CPC H03H 9/02913 (2013.01) [H01L 41/047 (2013.01); H01L 41/083 (2013.01); H01L 41/27 (2013.01); H03H 3/08 (2013.01); H03H 9/02559 (2013.01); H03H 9/02574 (2013.01); H03H 9/02834 (2013.01); H03H 9/131 (2013.01); H03H 9/54 (2013.01); H03H 9/6406 (2013.01); H03H 9/725 (2013.01)] | 20 Claims |
1. An acoustic wave device comprising:
a piezoelectric layer over a substrate;
an interdigital transducer electrode over the piezoelectric layer;
a grounding structure over the piezoelectric layer; and
a conductive layer positioned vertically between the piezoelectric layer and the substrate, the conductive layer being electrically connected to the grounding structure, the interdigital transducer electrode vertically overlapping at least a portion of the conductive layer.
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