CPC H01L 21/681 (2013.01) [B25J 9/1697 (2013.01); H01L 21/67161 (2013.01)] | 46 Claims |
1. An automatic teaching system for a substrate processing apparatus, the automatic teaching system comprising:
a frame having a workpiece load station with a predetermined load station reference location;
a robot transport mounted to the frame and having:
a movable transport arm with an end effector having a predetermined end effector reference location, and
a drive section driving the movable transport arm in at least one degree of freedom motion relative to the frame;
a machine vision system including both at least one fixed imaging sensor and at least one movable imaging sensor removably connected to the frame and configured to image at least one target of the machine vision system;
a load jig disposed for removable engagement with the workpiece load station, with both the at least one fixed imaging sensor and the at least one movable imaging sensor mounted to the load jig, the fixed imaging sensor having a predetermined pose with respect to the predetermined load station reference location, wherein the movable transport arm has at least one arm target, of the at least one target, in a predetermined position with respect to the predetermined end effector reference location and in view of the fixed imaging sensor with the load jig engaged with the workpiece load station; and
the movable imaging sensor has a justification feature on a base of the movable imaging sensor that justifies the movable imaging sensor in a predetermined position relative to the predetermined end effector reference location.
|