US 11,676,798 B2
Cooling for a plasma-based reactor
John Stephen Drewery, San Jose, CA (US); and Neil Martin Paul Benjamin, Palo Alto, CA (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Appl. No. 17/601,911
Filed by Lam Research Corporation, Fremont, CA (US)
PCT Filed Apr. 7, 2020, PCT No. PCT/US2020/027081
§ 371(c)(1), (2) Date Oct. 6, 2021,
PCT Pub. No. WO2020/210240, PCT Pub. Date Oct. 15, 2020.
Claims priority of provisional application 62/830,896, filed on Apr. 8, 2019.
Prior Publication US 2022/0139671 A1, May 5, 2022
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32119 (2013.01) [H01J 37/32522 (2013.01); H01J 2237/002 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A heat-pipe cooling system, comprising:
a conical structure having an upper portion that is truncated, the conical structure configured to be disposed above a dielectric window, the conical structure being configured to condense vapor from a first heat-transfer fluid formed within a volume between the dielectric window and the conical structure, the first heat-transfer fluid is configured to receive sufficient heat from the dielectric window to transform the first heat-transfer fluid from a liquid phase into a vapor phase without boiling, and, after contact with the conical structure, the vapor phase is to form a condensate from the condensed vapor; and
at least one cooling coil formed proximate to an exterior portion of the conical structure.