CPC G03F 7/70433 (2013.01) [G03F 7/162 (2013.01); G03F 7/168 (2013.01)] | 15 Claims |
1. A method of fabricating a micro-nano structure, comprising:
forming a reflective layer and a fluid polymer layer sequentially on a surface of a substrate;
pressurizing the substrate and a mask having a micro-nano pattern to attach to each other, squeezing the fluid polymer layer into a light-transmission area of the mask, and curing the fluid polymer layer; and
exposing, wherein a fluid polymer in the light-transmission area is configured to sense light under a combined effect of a transmitted light and a light reflected by the reflective layer, such that a micro-nano structure is obtained.
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