US 11,675,273 B2
Method of fabricating micro-nano structure
Xiangang Luo, Sichuan (CN); Yinghui Guo, Sichuan (CN); Mingbo Pu, Sichuan (CN); Xiong Li, Sichuan (CN); Xiaoliang Ma, Sichuan (CN); and Ping Gao, Sichuan (CN)
Assigned to The Institute of Optics and Electronics, The Chinese Academy of Sciences, Chengdu (CN)
Appl. No. 17/997,102
Filed by The Institute of Optics and Electronics, The Chinese Academy of Sciences, Sichuan (CN)
PCT Filed Apr. 28, 2021, PCT No. PCT/CN2021/090554
§ 371(c)(1), (2) Date Oct. 25, 2022,
PCT Pub. No. WO2021/219005, PCT Pub. Date Nov. 4, 2021.
Claims priority of application No. 202010354559.X (CN), filed on Apr. 29, 2020.
Prior Publication US 2023/0132100 A1, Apr. 27, 2023
Int. Cl. G03F 7/20 (2006.01); G03F 7/00 (2006.01); G03F 7/16 (2006.01)
CPC G03F 7/70433 (2013.01) [G03F 7/162 (2013.01); G03F 7/168 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A method of fabricating a micro-nano structure, comprising:
forming a reflective layer and a fluid polymer layer sequentially on a surface of a substrate;
pressurizing the substrate and a mask having a micro-nano pattern to attach to each other, squeezing the fluid polymer layer into a light-transmission area of the mask, and curing the fluid polymer layer; and
exposing, wherein a fluid polymer in the light-transmission area is configured to sense light under a combined effect of a transmitted light and a light reflected by the reflective layer, such that a micro-nano structure is obtained.