US 11,675,208 B1
Reflectometer, spectrophotometer, ellipsometer and polarimeter system with a super continuum laser source of a beam of electromagnetism, and improved detector system
Stefan Schoeche, Lincoln, NE (US); Martin M. Liphardt, Lincoln, NE (US); Ping He, Lincoln, NE (US); Jeremy A Van Derslice, Dwight, NE (US); Craig M. Herzinger, Lincoln, NE (US); Jeffrey S. Hale, Lincoln, NE (US); Brian D. Guenther, Lincoln, NE (US); Duane E. Meyer, Lincoln, NE (US); John A Woollam, Lincoln, NE (US); and James D. Welch, Omaha, NE (US)
Assigned to J.A. WOOLLAM CO., INC., Lincoln, NE (US)
Filed by J.A. WOOLLAM CO., INC, Lincoln, NE (US)
Filed on Mar. 5, 2021, as Appl. No. 17/300,091.
Application 17/300,091 is a continuation in part of application No. 16/602,088, filed on Aug. 5, 2019, granted, now 11,035,729.
Application 16/602,088 is a continuation in part of application No. 16/350,017, filed on Sep. 12, 2018, granted, now 10,422,739.
Application 16/350,017 is a continuation in part of application No. 15/330,430, filed on Sep. 20, 2016, granted, now 10,132,684.
Application 16/602,088 is a continuation in part of application No. 15/330,430, filed on Sep. 20, 2016, granted, now 10,132,684.
Application 15/330,430 is a continuation in part of application No. 14/757,280, filed on Dec. 14, 2015, granted, now 10,247,611.
Claims priority of provisional application 63/143,187, filed on Jan. 29, 2021.
Claims priority of provisional application 62/284,441, filed on Sep. 30, 2015.
Claims priority of provisional application 62/124,428, filed on Dec. 18, 2014.
Int. Cl. G02B 27/48 (2006.01); G01B 9/02 (2022.01); G01B 11/24 (2006.01)
CPC G02B 27/48 (2013.01) [G01B 9/02084 (2013.01); G01B 11/24 (2013.01)] 42 Claims
OG exemplary drawing
 
1. A sample investigation system selected from the group consisting of:
a reflectometer;
a spectrophotometer;
an ellipsometer; and
a polarimeter;
comprising:
a) a source of a spectroscopic beam of electromagnetic radiation;
b) a stage for supporting a sample; and
c) a detector system for monitoring electromagnetic radiation provided from a single sample;
said system being distinguished in that:
said source of a spectroscopic beam of electromagnetic radiation is a supercontinuum laser that provides a high intensity, highly directional coherent spectrum of electromagnetic radiation wavelengths within a range comprising 400 to at least 4400 nm, that results from interaction of a pulsed laser and non-linear processes to cause extensive spectral broadening; and
said sample investigation system further comprising a speckle reducer; said speckle reducer serving to reduce wild swings in intensity of electromagnetic radiation as a function of time and position in a beam, resulting from interference effects between different coherent wavelengths in said extensively broadened spectrum;
and in that said sample investigation system is characterized by at least one selection from the group consisting of:
in use, said source of a spectroscopic beam of electromagnetic radiation directs a beam provided thereby to a sample placed on said stage for supporting a sample, at an angle thereto, but does not involve said beam passing through a combination beam splitter and objective lens, in that order;
in use, fluorescence caused to occur by an illumination beam of electromagnetic radiation is not detected by a detector for spatially resolving radiation emitted by an object to be examined, and an illumination beam path between an illumination means and an object to be examined, and a detection beam path between said object to be examined and a detector do not comprise illumination optics which are designed to generate a light sheet of illumination radiation extending transverse to the illumination beam path, and wherein the axis of the detection beam path is oriented substantially perpendicular to a section plane of light sheet and the object to be examined, and an illumination beam path between an illumination means and an object to be examined, and a detection beam path between said object to be examined and a detector do not comprise illumination optics which are designed to generate a light sheet of illumination radiation extending transverse to an axis of the illuminating beam path, and the detection beam path is not oriented at an angle diverging from θ degrees to a section plane of the light sheet and of the object to be examined; and
in use said system does not utilize a supercontinuum source comprised of a pulsed laser adapted to pump into a photonic crystal fiber made from chalogenide glasses as a substantial element; or from a pumping CO2 laser adapted to fire into a photonic crystal fiber formed in part from at least one selection from the group of: AlClxBr(1-x), NaCl and ZnSe; or a system comprising a Titanium:Saphire laser adapted to fire femtosecond pulses through a non-linear optical element disposed in an inert gas in a gas containment cell, such that a second harmonic pulse is produced and generates supercontinuum terahertz radiation.