	US 11,674,981 B2
	Arc detector for detecting arcs, plasma system and method of detecting arcs
Andrzej Klimczak, Warsaw (PL); Konrad Lewandowski, Kobylka (PL); and Marcin Golan, Warsaw (PL)
Assigned to TRUMPF HUETTINGER SP. Z O. O., Zielonka (PL)
Filed by TRUMPF Huettinger Sp. z o. o., Zielonka (PL)
Filed on Jan. 29, 2021, as Appl. No. 17/161,768.
Application 17/161,768 is a continuation of application No. PCT/EP2019/070372, filed on Jul. 29, 2019.
Claims priority of application No. 18461597 (EP), filed on Aug. 2, 2018.
Prior Publication US 2021/0156893 A1, May 27, 2021
Int. Cl. G01R 19/00 (2006.01); G01R 19/165 (2006.01); G01R 27/02 (2006.01); H01J 37/34 (2006.01); H01J 37/32 (2006.01)

CPC G01R 19/0061 (2013.01) [G01R 19/16566 (2013.01); G01R 27/02 (2013.01); H01J 37/32082 (2013.01); H01J 37/3476 (2013.01); H01J 2237/24564 (2013.01); H01J 2237/332 (2013.01)]

22 Claims

1. An arc detector for detecting arcs in a Radio Frequency (RF) plasma system, the arc detector comprising: at least two inputs, each respective input configured to connect to a respective RF source; at least one output configured to connect to a plasma load, a 3 dB coupler connected to the at least two inputs and the at least one output, a measuring device configured to measure at least two physical quantities transmitted between the 3 dB coupler and the at least one output, a determinator configured to determine an evaluation quantity based on the at least two physical quantities, a differentiator configured to differentiate the evaluation quantity, and a comparator configured to compare the output quantity of the differentiator with a reference value indicative of an arc.