CPC G01R 1/07364 (2013.01) [G01R 1/04 (2013.01); G01R 1/07342 (2013.01); G01R 31/2831 (2013.01); G01R 31/2891 (2013.01)] | 20 Claims |
1. A method of operating an integrated circuit (IC) tester platform, the method comprising:
measuring a planar error between a probe card surface and one or more devices under test (DUT);
determining, based on the measuring, which of a plurality of linear actuators in a gimbal platform coupled to a probe card is to operate to reduce the planar error; and
transmitting instructions to cause one or more of the plurality of linear actuators to extend or retract a shaft in a direction non-perpendicular to the probe card surface in a manner that reduces the planar error.
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