CPC G01J 5/0837 (2013.01) [G01J 5/24 (2013.01); H01L 27/14652 (2013.01); H01L 31/02327 (2013.01); H01L 31/09 (2013.01); G01J 2005/202 (2013.01)] | 13 Claims |
1. An apparatus for detecting infrared radiation, comprising:
one or more detector pixels, each having a semiconductor portion;
a first subpattern of one or more nanoantenna elements of a first size disposed on the semiconductor portion of each of the detector pixels;
a second subpattern of one or more nanoantenna elements of a second size unequal to the first size, disposed on the semiconductor portion of each of the detector pixels and interpolated laterally between nanoantenna elements of the first subpattern;
a first collection electrode for collecting photogenerated current from the first subpattern on each of the detector pixels; and
a second collection electrode for collecting photogenerated current from the second subpattern on each of the detector pixels.
|