US 11,674,797 B2
Self-aligned light angle sensor using thin metal silicide anodes
Shrenik Deliwala, Andover, MA (US); Paul W. Stevens, Norwood, MA (US); and William Edward O'Mara, Methuen, MA (US)
Assigned to Analog Devices, Inc., Norwood, MA (US)
Filed by Analog Devices, Inc., Norwood, MA (US)
Filed on Mar. 22, 2020, as Appl. No. 16/826,257.
Prior Publication US 2021/0293535 A1, Sep. 23, 2021
Int. Cl. G01B 11/27 (2006.01); H01L 29/66 (2006.01); H01L 29/872 (2006.01)
CPC G01B 11/272 (2013.01) [H01L 29/66143 (2013.01); H01L 29/872 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A self-aligned light angle sensor which forgoes the need for calibration comprising:
a substrate;
a cathode disposed on the substrate;
an intrinsic layer disposed on the cathode;
left and right anodes, each of which is disposed on the intrinsic layer and configured to sense light therein, wherein the left and right anodes comprise a metal;
a blocking member disposed proximally to the left and right anodes; and
a passivation layer between the blocking member and each of the left and right anodes.
 
9. A light angle sensor comprising:
a cathode;
an intrinsic layer disposed on the cathode;
left and right anodes, each of which is disposed on the intrinsic layer and configured to sense light therein;
a blocking member disposed proximally to the left and right anodes; and
a passivation layer between the blocking member and each of the left and right anodes,
wherein the left and right anodes comprise a metal silicide.
 
13. A light angle sensor comprising:
a cathode;
an intrinsic layer disposed on the cathode;
left and right anodes, each of which is disposed on the intrinsic layer and configured to sense light therein, wherein the left and right anodes comprise a metal silicide;
a first blocking member disposed proximally to the left anode;
a second blocking member disposed proximally to the right anode, the second blocking member spaced apart from the first blocking member; and
a passivation layer between the first blocking member and the left anode and between the second blocking member and the right anode.