CPC E05D 3/06 (2013.01) [B81B 7/0003 (2013.01); G01C 19/56 (2013.01); G01P 15/08 (2013.01); B81B 3/0037 (2013.01); B81B 2201/0235 (2013.01); B81B 2203/0154 (2013.01); B81B 2203/053 (2013.01)] | 18 Claims |
1. A hinge between a first element and a second element of a microelectromechanical system, the first element and the second element movable relative to each other at least in an out-of-plane direction, said hinge comprising:
a first rigid part,
a second part fixed to the first rigid part at one end and configured to be anchored on the first element, said second part being configured to deform in bending in a first direction, and
two third parts fixed to the first rigid part and configured to be anchored to the second element, the two third parts being configured to deform in bending along a second direction orthogonal to the first direction.
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