US 11,674,344 B2
Out-of-plane hinge for micro and nanoelectromechanical systems with reduced non-linearity
Samer Dagher, Grenoble (FR); and Loic Joet, Grenoble (FR)
Assigned to COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, Paris (FR)
Filed by COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, Paris (FR)
Filed on Dec. 17, 2019, as Appl. No. 16/716,632.
Claims priority of application No. 18 73564 (FR), filed on Dec. 20, 2018.
Prior Publication US 2020/0199923 A1, Jun. 25, 2020
Int. Cl. E05D 3/06 (2006.01); B81B 7/00 (2006.01); G01C 19/56 (2012.01); G01P 15/08 (2006.01); B81B 3/00 (2006.01)
CPC E05D 3/06 (2013.01) [B81B 7/0003 (2013.01); G01C 19/56 (2013.01); G01P 15/08 (2013.01); B81B 3/0037 (2013.01); B81B 2201/0235 (2013.01); B81B 2203/0154 (2013.01); B81B 2203/053 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A hinge between a first element and a second element of a microelectromechanical system, the first element and the second element movable relative to each other at least in an out-of-plane direction, said hinge comprising:
a first rigid part,
a second part fixed to the first rigid part at one end and configured to be anchored on the first element, said second part being configured to deform in bending in a first direction, and
two third parts fixed to the first rigid part and configured to be anchored to the second element, the two third parts being configured to deform in bending along a second direction orthogonal to the first direction.