US 11,674,237 B2
Method for fabricating a crystalline metal-phosphide hetero-layer by converting first and second crystalline metal-source layers into first and second crystalline metal phosphide layers
Yannick Baumgartner, Thalwil (CH); Bernd W. Gotsmann, Horgen (CH); Jean Fompeyrine, Waedenswil (CH); and Lukas Czornomaz, Zurich (CH)
Assigned to International Business Machines Corporation, Armonk, NY (US)
Filed by International Business Machines Corporation, Armonk, NY (US)
Filed on May 14, 2019, as Appl. No. 16/411,651.
Prior Publication US 2020/0362446 A1, Nov. 19, 2020
Int. Cl. C30B 1/02 (2006.01); C30B 1/10 (2006.01); H01L 21/02 (2006.01); H01L 43/10 (2006.01)
CPC C30B 1/02 (2013.01) [C30B 1/026 (2013.01); C30B 1/10 (2013.01); H01L 21/02543 (2013.01); H01L 43/10 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A method for fabricating a crystalline metal-phosphide hetero-layer, the method comprising;
providing a crystalline base substrate;
forming a crystalline buffer layer on the crystalline base substrate;
forming a first crystalline metal-source layer comprising a first metal source on the crystalline buffer layer, wherein the first crystalline metal-source is a metal oxide of W, Mo or Nb, or a metal nitride of W, Mo or Nb;
forming a second crystalline metal-source layer comprising a second metal-source on the first crystalline metal-source layer, wherein the second crystalline metal-source is a metal oxide of W, Mo or Nb, or a metal nitride of W, Mo or Nb and is compositionally different from the first metal-source;
performing a chemical conversion reaction to convert the first crystalline metal-source layer into a first crystalline metal phosphide layer; and
performing a chemical conversion reaction to convert the second crystalline metal-source layer into a second crystalline metal phosphide layer.