CPC C30B 1/02 (2013.01) [C30B 1/026 (2013.01); C30B 1/10 (2013.01); H01L 21/02543 (2013.01); H01L 43/10 (2013.01)] | 11 Claims |
1. A method for fabricating a crystalline metal-phosphide hetero-layer, the method comprising;
providing a crystalline base substrate;
forming a crystalline buffer layer on the crystalline base substrate;
forming a first crystalline metal-source layer comprising a first metal source on the crystalline buffer layer, wherein the first crystalline metal-source is a metal oxide of W, Mo or Nb, or a metal nitride of W, Mo or Nb;
forming a second crystalline metal-source layer comprising a second metal-source on the first crystalline metal-source layer, wherein the second crystalline metal-source is a metal oxide of W, Mo or Nb, or a metal nitride of W, Mo or Nb and is compositionally different from the first metal-source;
performing a chemical conversion reaction to convert the first crystalline metal-source layer into a first crystalline metal phosphide layer; and
performing a chemical conversion reaction to convert the second crystalline metal-source layer into a second crystalline metal phosphide layer.
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