US 11,674,223 B2
Reactor for coating particles in stationary chamber with rotating paddles and gas injection
Jonathan Frankel, Los Gatos, CA (US); Colin C. Neikirk, Sunnyvale, CA (US); Pravin K. Narwankar, Sunnyvale, CA (US); Quoc Truong, San Ramon, CA (US); Govindraj Desai, Karnataka (IN); Sekar Krishnasamy, Bangalore (IN); and Shrikant Swaminathan, Santa Clara, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Apr. 22, 2020, as Appl. No. 16/855,871.
Claims priority of provisional application 62/838,237, filed on Apr. 24, 2019.
Prior Publication US 2020/0338521 A1, Oct. 29, 2020
Int. Cl. C23C 16/44 (2006.01); C23C 16/455 (2006.01); B01J 19/00 (2006.01); B01J 19/18 (2006.01); B01F 27/051 (2022.01); B01F 27/70 (2022.01); B01F 27/07 (2022.01); B01F 27/112 (2022.01); B01F 27/072 (2022.01)
CPC C23C 16/4417 (2013.01) [B01F 27/051 (2022.01); B01F 27/074 (2022.01); B01F 27/0726 (2022.01); B01F 27/112 (2022.01); B01F 27/70 (2022.01); B01J 19/0066 (2013.01); B01J 19/18 (2013.01); C23C 16/45555 (2013.01)] 18 Claims
OG exemplary drawing
 
11. A reactor for coating particles, comprising:
a stationary vacuum chamber to hold a bed of particles to be coated, the vacuum chamber having a lower portion that forms a half-cylinder and an upper portion;
a vacuum port in the upper portion of the vacuum chamber;
a motor;
a paddle assembly including:
a rotatable drive shaft extending through the vacuum chamber along an axial axis of the half-cylinder,
a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by the motor orbits the plurality of paddles about the drive shaft; and
a first gas injection assembly configured to receive a first liquid from one or more fluid sources, the first gas injection assembly including a vaporizer to convert the first liquid to a first reactant or precursor gas, a manifold to receive the first reactant or precursor gas from the vaporizer, and a plurality of channels leading from the manifold to a plurality of apertures,
wherein the plurality of apertures extend through a wall of the lower portion of the stationary vacuum chamber to an inner surface of the half-cylinder formed by the lower portion of the stationary vacuum chamber, and
wherein the plurality of apertures are configured to inject the first reactant or precursor gas such that the first reactant or precursor gas flow injected into the vacuum chamber is substantially tangent to a curvature of the inner surface of the half-cylinder formed by the lower portion of the vacuum chamber.