US 11,674,214 B2
Deposition mask and method of manufacturing deposition mask
Isao Miyatani, Tokyo (JP); Daigo Aoki, Tokyo (JP); Masato Ushikusa, Tokyo (JP); Yoshinori Murata, Tokyo (JP); and Hideyuki Okamoto, Tokyo (JP)
Assigned to Dai Nippon Printing Co., Ltd., Tokyo (JP)
Filed by Dai Nippon Printing Co., Ltd., Tokyo (JP)
Filed on Apr. 22, 2020, as Appl. No. 16/855,016.
Application 16/855,016 is a continuation of application No. PCT/JP2018/038495, filed on Oct. 16, 2018.
Claims priority of application No. JP2017-208569 (JP), filed on Oct. 27, 2017.
Prior Publication US 2020/0291509 A1, Sep. 17, 2020
Int. Cl. C23C 14/04 (2006.01); C23C 14/20 (2006.01); H10K 71/16 (2023.01); H10K 71/00 (2023.01)
CPC C23C 14/042 (2013.01) [C23C 14/20 (2013.01); H10K 71/166 (2023.02); H10K 71/00 (2023.02)] 8 Claims
OG exemplary drawing
 
1. A deposition mask comprising:
an effective part including center openings and outermost openings; and
an outer frame part surrounding the effective part;
wherein the openings are arranged in the effective part along two directions orthogonal to each other at respective predetermined pitches,
wherein the outer frame part s not provided with openings, or a distribution density of openings in the outer frame part is lower that a distribution density of the openings in the effective part,
wherein the effective part includes an outer peripheral area that encompasses the outermost openings and borders the outer frame part, and a central area that is surrounded by the outer peripheral area and that has a thickness larger than a thickness of the outer peripheral area,
wherein the effective part includes 9 areas which are obtained by virtually trisecting the effective part respectively along a first direction and a second direction orthogonal to the first direction, with 8 areas out of the 9 areas adjacent to the outer frame part constituting the outer peripheral area, and the remaining 1 area out of 9 areas constituting the central area;
wherein when an average value of the thicknesses of the outer peripheral area is represented as T1, a standard deviation of the thicknesses of the outer peripheral area is represented as σ1, and an average value of the thicknesses of the central area is represented as T2, the following relational expressions are satisfied:
T1<T2; and
3σ1<T2/2,
wherein the average value T1 and the standard deviation σ1 of the thicknesses of the outer peripheral area are calculated based on thicknesses at 72 locations in the outer peripheral area, and the thicknesses at the 72 locations are obtained by measuring thicknesses at 9 locations in each of the 8 areas constituting the outer peripheral area;
the average value T2 of the thickness of the central area is calculated by measuring the thicknesses at 9 locations in the remaining 1 area constituting the central area; and
wherein 81 locations including the 72 locations in the outer peripheral area and the 9 locations in the central area are distributed at a predetermined pitch in the effective part so as not to coincide with the openings.