CPC B24B 37/32 (2013.01) [H01L 21/30625 (2013.01); H01L 21/67063 (2013.01); H01L 21/67092 (2013.01); H01L 21/68735 (2013.01)] | 20 Claims |
1. A retaining ring, comprising:
a generally annular body having an inner surface to constrain a substrate, an outer surface, and a bottom surface, the bottom surface having a plurality of channels extending from the outer surface to the inner surface and a plurality of islands separated by the channels and providing a contact area to contact a polishing pad, wherein each channel includes a recessed region adjacent the outer surface such that the channel is deeper in the recessed region than in a remainder of the channel, and the recessed region and the remainder of the channel each have substantially uniform depth.
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