US 11,673,219 B2
Spindle unit
Naili Liu, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Jul. 29, 2020, as Appl. No. 16/941,836.
Claims priority of application No. JP2019-144400 (JP), filed on Aug. 6, 2019.
Prior Publication US 2021/0039213 A1, Feb. 11, 2021
Int. Cl. B23Q 11/08 (2006.01); B23Q 1/70 (2006.01); B24B 55/00 (2006.01); B24B 41/04 (2006.01); F16C 32/06 (2006.01); B23Q 11/12 (2006.01)
CPC B23Q 11/0883 (2013.01) [B23Q 1/70 (2013.01); B24B 41/04 (2013.01); B24B 55/00 (2013.01); F16C 32/06 (2013.01); B23Q 11/127 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A spindle unit comprising:
a spindle having a distal end coupled to a mount for mounting a processing tool;
a casing surrounding an outer circumferential surface of the spindle, the spindle being rotatably supported by an air bearing in the casing; and
a spindle cover surrounding the spindle between a lower end of the casing and the mount, wherein the spindle cover includes:
a cover portion having an inner circumferential surface facing the outer circumferential surface of the spindle, the inner circumferential surface of the cover portion and the outer circumferential surface of the spindle defining a first gap therebetween, and
a sealing portion integrally formed with the cover portion at a lower end of the cover portion and having a first inner oblique surface inclined toward the outer circumferential surface of the spindle, and
the sealing portion and the outer circumferential surface of the spindle define therebetween a second gap that is narrower than the first gap for preventing a solid waste from being dried and deposited on the outer circumferential surface of the spindle, wherein a clearance between the spindle on the one side and the casing and the spindle cover on the other side forms a channel filled exclusively with air from the air bearing which discharges partially through the second gap, wherein the channel includes both the first gap and the second gap.