CPC B08B 7/04 (2013.01) [B08B 3/08 (2013.01); B08B 7/0035 (2013.01); B08B 9/08 (2013.01); C23C 14/12 (2013.01); C23C 14/24 (2013.01); C23C 14/566 (2013.01); H01L 51/001 (2013.01); H01L 51/0011 (2013.01); H01L 51/56 (2013.01); B08B 2209/08 (2013.01)] | 20 Claims |
1. A method for cleaning a vacuum system used in the manufacture of OLEO devices, comprising:
performing pre-cleaning for cleaning at least a portion of a vacuum system, wherein the pre-cleaning includes a wet chemical cleaning process; and
performing plasma cleaning using a remote plasma source, the plasma cleaning performed after the pre-cleaning.
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